|
課程名稱 |
高科技廠房設施設計
High-tech Facility Design |
|
開課學期 |
100-1 |
|
授課對象 |
工學院 營建工程與管理組 |
|
授課教師 |
張陸滿 |
|
課號 |
CIE5065 |
|
課程識別碼 |
521 U3790 |
|
班次 |
|
|
學分 |
3 |
|
全/半年 |
半年 |
|
必/選修 |
選修 |
|
上課時間 |
星期二A,B,C(18:25~21:05) |
|
上課地點 |
土研402 |
|
備註 |
上課時間:星期二18:30-21:30與陳柏翰合開
限學士班三年級以上
總人數上限：60人 |
|
Ceiba 課程網頁 |
http://ceiba.ntu.edu.tw/1001_CE521_U3790 |
|
課程簡介影片 |
|
|
核心能力關聯 |
核心能力與課程規劃關聯圖 |
|
課程大綱
|
|
為確保您我的權利,請尊重智慧財產權及不得非法影印
|
|
課程概述 |
The purpose of this course is to provide basic design knowledge needed for cleanroom facilities that supplement high-tech manufacturing and R&D. High-Tech includes, not limited to, the advanced technologies applied in the fields of microelectronics, optoelectronics, precision equipment, telecommunication, nanotech, pharmaceutics, biotech, medical devices, animal experiment, and Aerospace. The processes undertaken in high-tech manufacturing plants and R&D labs require cleanrooms with extremely stringent environmental control.
The environmental control includes temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel heath, safety and security and prevention of biohazard.
The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra pure clean room and ultra pure utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing plant and research lab.
The environmental control includes temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials out-gassing, safe grounding, assurance of personnel heath, safety and security and prevention of biohazard.
The focus of this course is on designing cleanroom and engineering its associated facilities. Students will gain skills needed to meet ever-changing challenge of delivering an ultra pure clean room and ultra pure utilities. Moreover, this course will strengthen students’ understanding and background in constructing high-tech manufacturing plant and research lab.
Outstanding full-time students will be recommended to receive summer intermship fr |
|
課程目標 |
1.Differentiate the typical processes in semiconductor, biotech,
devices, and pharmaceutical manufacturing and R&D.
2.Explain the interdisciplinary nature of high tech manufacturing and research.
3.Perform architectural design for cleanroom and schematically layout factory.
4.Use the basic theories and principles to design systems for heating, ventilation and air conditioning (HVAC,) water/air treatment, noise and vibration mitigation.
5.Classify cleanrooms in terms of various international standards.
6.Specify the environmental control criteria for cleanroom in terms of temperature and humidity level, air/water quality, purity of chemicals and gases, noise and vibration degree, electromagnetic and radio frequency interference, electrostatic discharge, materials outgassing, and safe grounding.
7.Apply the knowledge in testing and commissioning cleanroom and its associated facilities.
8.Establish contamination control programs for constructing, operating, and maintaining the high-tech facilities.
9.Address the issues in automatically managing the emergency, safety, and security systems.
10.Link to the information sources for further studies in nano/micro fabrication and research.
|
|
課程要求 |
This course is intended to offer for EMBA, MS, & PhD Graduates, and undergraduate Juniors and Seniors. Students in engineering, science, pharmacy, and life sciense will be exposed to fundamental theories and their applications in the design/build/certify of the high tech manufacturing plants and research labs. Academic faculty will teach basic theories and principles. Professional industrial experts will be invited to cover the application of theories and principles in the real world practices. The contents will include lectures, home works, a semester team project with an oral presentation and a written report, and a final examination. Field trips to visit high-tech plants and research labs, and cleanrooms will be arranged. Moreover, laboratory experiments will be provided to enable students to have hands-on experiences in the environmental impact on high-tech manufacturing and research.
There will be approximate 8 homeworks in Fall 2010. Homework counts 15% of “Total Grade.” Students will have reading assignments. The homework is to answer the questions derived from the reading assignments, lectures, lab experiments, cleanroom tour, or field trips.
Meanwhile, each stdudent will be required to write a maximum 15-page report in either Chinese or English (Double Space.) The page limitation imposes an organizational and summarization burden on student. Student must be concise and turn in timely. Figures, tables and graphs often help present useful concepts in less space. You should start selecting your high-tech related topic right after semester start. To avoid overlapping, the topic must obtain Professor Chang's approval.
There is one (1) group term project. The group term project tests the student understands of the principal concepts covered in the course within the context of a comprehensive “real-world” problem. It also provides an opportunity to develop skills for working in a project team context and communication skills. The term project counts 50% of the final grade. Off-c |
|
預期每週課後學習時數 |
|
|
Office Hours |
|
|
指定閱讀 |
|
|
參考書目 |
1. Chang, C.Y., and Sze, S.M., ULSI Technology, McGraw-Hill Company, Inc., International Edition, 1996, New York.
2. Food and Drug Administration, Guideline on Sterile Drug Products Produced by Aseptic Processing, FDA, Information Branch, Rockville, Maryland, USA.
3. International Organization for Standards, ISO Standard 14644-4, part 4: Design, Construction, Start up, Geneva, Switzerland, 1999.
4. International Society of Pharmaceutical Engineering, Pharmaceutical Engineering Guide — A Guide for New Facilities, Volume 3: Sterile Manufacturing Facilities, ISPE, 2000.
5. Lurgi, S., Xu, J., and Zaslavsky, A., Future Trends in Microelectronics, Wiley, N.Y, 1999.
6. Mulhall, D., Our Molecular Future: How Nanotechnology, Robotics, Genetics, and Artificial Intelligence Will Transform Our World, Prometheus Books, Amherst, N.Y., 2002.
7. Nishi, Y., Doering, K., and Wooldridge, T., Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York, 2000.
8. Scherge, M., Biological Micro- and Nanotribiology: Nature’s Solutions, Sprinker, New York, 2001.
9. Van Zant, Peter, Microchip Fabrication: A Practical Guide to Semiconductor Processing, 4th ed., McGraw-Hill, New York, 2000.
10. Whyte. W., Cleanroom Technology: Fundamentals of Design, Testing, and Operation Operation, Chichester, New York, 2001.
11. 半導體製造技術，Quirk Serda 著，羅文雄、蔡榮輝 譯 ，滄海（2003）
12. 半導體奈米技術，龍文安 著，五南(2006)
13. 半導體英語，傳田精一 著，陳連春 譯，建興(2003)
14. 高科技廠務，顏登通，全華科技(2008)
|
|
評量方式
(僅供參考) |
|
|
週次 |
日期 |
單元主題 |
|
Week 1 |
9/13 |
Course Introduction of High-Tech & Nanotechnology |
|
Week 2 |
9/20 |
Semiconductor Manufacturing Processes & Picoscope |
|
Week 3 |
9/27 |
Fab Design, Manufacturing Tools & Contamination Control |
|
Week 4 |
10/04 |
Cleanroom and Related Issues |
|
Week 5 |
10/11 |
High-Tech Fab/Plant Layout |
|
Week 6 |
10/18 |
Fundamentals of Vibration, Sound & Mitigation |
|
Week 7 |
10/25 |
Ground Vibration & Microvibration on Semiconductor Fab and Its Mitigation |
|
Week 8 |
11/01 |
Pharmaceutical, Medical Devices, and Biotech Manufacturing and
Cleanroom |
|
Week 9 |
11/08 |
No Mid-term Exam, Field Trips Industrial Park and High-Tech Fab/Plant and Environment & Ecological Park in Chia-Ee on 11/19-20 |
|
Week 10 |
11/15 |
Electro-Magnetic Compatibility |
|
Week 11 |
11/22 |
HVAC Design |
|
Week 12 |
11/29 |
Electrical Systems and Power Stability in High-Tech Facilities |
|
Week 13 |
12/06 |
Ultra Pure Utility & Piping System and Airborne Molecular Contamination |
|
Week 14 |
12/13 |
Field Trips to Fabs of Solar Energy, LED, Photon Source, or TFT and learn their Manufacturing Processes |
|
Week 15 |
12/20 |
Pharmaceutical, Medical Devices, and Biotech Manufacturing and GMP |
|
Week 16 |
12/27 |
No Class Fab Tour, Compensation for Field Trip on 12/20. Project Scheduling and Control & Cleanroom Commissioning. A whole day tour will be held on a weekend. Student must attend except in emergency. |
|
Week 17 |
1/03 |
Term Project Presentation |
|